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| Accuracy Classes | ||||||
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| return | The following measuring instruments can be delivered: |
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| C-Device |
MPEE1 ≤ 0.5 µm |
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| S-Device |
MPEE1 ≤ (0.3+L/1000) µm |
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| HA-Device |
MPEE1 ≤ (0.15+L/1500) µm |
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| EX-Device |
MPEE1 ≤ (0.1+L/2000) µm |
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